JPH01163328U - - Google Patents
Info
- Publication number
- JPH01163328U JPH01163328U JP5921288U JP5921288U JPH01163328U JP H01163328 U JPH01163328 U JP H01163328U JP 5921288 U JP5921288 U JP 5921288U JP 5921288 U JP5921288 U JP 5921288U JP H01163328 U JPH01163328 U JP H01163328U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- earth shield
- glow discharge
- divided frame
- electrode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5921288U JPH0627948Y2 (ja) | 1988-04-30 | 1988-04-30 | 高周波グロー放電装置の電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5921288U JPH0627948Y2 (ja) | 1988-04-30 | 1988-04-30 | 高周波グロー放電装置の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01163328U true JPH01163328U (en]) | 1989-11-14 |
| JPH0627948Y2 JPH0627948Y2 (ja) | 1994-07-27 |
Family
ID=31284995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5921288U Expired - Lifetime JPH0627948Y2 (ja) | 1988-04-30 | 1988-04-30 | 高周波グロー放電装置の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627948Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006049262A (ja) * | 2004-07-06 | 2006-02-16 | Sekisui Chem Co Ltd | プラズマ処理装置 |
-
1988
- 1988-04-30 JP JP5921288U patent/JPH0627948Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006049262A (ja) * | 2004-07-06 | 2006-02-16 | Sekisui Chem Co Ltd | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627948Y2 (ja) | 1994-07-27 |